Inpria Gets $23.5M More For UV Lithography Technology

Corvallis, Oregon-based Inpria, a developer of technology used for extreme ultraviolet lithography (EUV), has raised $23.5M in a Series B funding. The funding was led by Samsung Ventures and also included ALIAD (the investment arm of Air Liquide), Applied Ventures, and Intel Capital, along with JSR Corporation. Inpria is developing high-resolution metal oxide photoresists used in the EUV process. The company's CEO is Andrew Grenville. More information »